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Thin film Si on TFLN
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Novel high speed optical chip materials - Thin film Si on TFLN
Specification
Si on TFLN (R&D)
Structure
Si/SiO2/LN/Ox/Si or Si/LN/Ox/Si
Diameter
4inch
Piezo-layer
Si & LN
Thickness@Si
300-1000nm
Thickness@LN
300-600nm